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Journal Article

Analysis of local strain in aluminium interconnects by energy filtered CBED

MPS-Authors
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Krämer,  S.
Former Dept. Microstructure Interfaces, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Mayer,  J.
Former Dept. Microstructure Interfaces, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Weickenmeier,  A.
Former Dept. Microstructure Interfaces, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Rühle,  M.
Former Dept. Microstructure Interfaces, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Krämer, S., Mayer, J., Weickenmeier, A., & Rühle, M. (2000). Analysis of local strain in aluminium interconnects by energy filtered CBED. Ultramicroscopy, 81, 245-262.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0010-39E0-2
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