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Transmission electron microscopy study of erbium silicide formation from Ti/Er stack for Schottky contact applications

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Phillipp,  F.
Stuttgart Center for Electron Microscopy, Max Planck Institute for Intelligent Systems, Max Planck Society;

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van Aken,  P. A.
Stuttgart Center for Electron Microscopy, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Ratajczak, J., Łaszcz, A., Czerwinski, A., Katcki, J., Phillipp, F., van Aken, P. A., et al. (2010). Transmission electron microscopy study of erbium silicide formation from Ti/Er stack for Schottky contact applications. Journal of Microscopy, 237(3), 379-383.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0010-3B64-A
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