Evaluation of the depth resolutions of auger electron spectroscopic, X-ray 
photoelectron spectroscopic and time-of-flight secondary-ion mass spectrometric 
sputter depth profiling techniques

Wang, J. Y.; Starke, U.; Mittemeijer, E. J.

doi:10.1016/j.tsf.2009.01.007

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Evaluation of the depth resolutions of auger electron spectroscopic, X-ray photoelectron spectroscopic and time-of-flight secondary-ion mass spectrometric sputter depth profiling techniques

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Wang, J. Y.
Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Mittemeijer, E. J.
Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society;
Universität Stuttgart, Institut für Materialwissenschaft;

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引用

Wang, J. Y., Starke, U., & Mittemeijer, E. J. (2009). Evaluation of the depth resolutions of auger electron spectroscopic, X-ray photoelectron spectroscopic and time-of-flight secondary-ion mass spectrometric sputter depth profiling techniques. Thin Solid Films, 517, 3402-3407. doi:10.1016/j.tsf.2009.01.007.

引用: https://hdl.handle.net/11858/00-001M-0000-0010-3DD0-C

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