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Journal Article

Electron backscattering in sputter depth profiling using AED, EPES, and REELS

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Hofmann,  S.
Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Hofmann, S. (2008). Electron backscattering in sputter depth profiling using AED, EPES, and REELS. Journal of Surface Analysis, 15(2), 130-138.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0010-4170-1
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