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Thin tantalum-silicon-oxygen/tantalum-silicon-nitrogen films as high efficiency humidity diffusion barriers for solar cell encapsulation

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Zhang,  Z. L.
Former Dept. Microstructure Interfaces, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Heuer, H., Wenzel, C., Herrmann, D., Hubner, R., Zhang, Z. L., & Bartha, J. W. (2006). Thin tantalum-silicon-oxygen/tantalum-silicon-nitrogen films as high efficiency humidity diffusion barriers for solar cell encapsulation. Thin Solid Films, 515(4), 1612-1617.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0010-44FF-7
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