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Journal Article

Structure of sputtered nanocomposite CrCx/a-C:H thin films

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Srot,  V.
Former Dept. Microstructure Interfaces, Max Planck Institute for Intelligent Systems, Max Planck Society;
Stuttgart Center for Electron Microscopy, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Scheu,  C.
Former Dept. Microstructure Interfaces, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Citation

Gassner, G., Patscheider, J., Mayrhofer, P. H., Hegedus, E., Toth, L., Kovacs, I., et al. (2006). Structure of sputtered nanocomposite CrCx/a-C:H thin films. Journal of Vacuum Science & Technology B, 24(4), 1837-1843.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0010-45BE-2
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