Periodic pillar structures by Si etching of multilayer GeSi/Si islands

Zhong, Z.; Katsaros, G.; Stoffel, M.; Costantini, G.; Kern, K.; Schmidt, O. G.; Jin-Phillipp, N. Y.; Bauer, G.

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Periodic pillar structures by Si etching of multilayer GeSi/Si islands

MPS-Authors

Zhong, Z.
Max Planck Society;

Katsaros, G.
Max Planck Society;

Stoffel, M.
Max Planck Society;

Costantini, G.
Max Planck Society;

Kern, K.
Max Planck Society;

Schmidt, O. G.
Max Planck Society;

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Jin-Phillipp, N. Y.
Former Dept. Microstructure Interfaces, Max Planck Institute for Intelligent Systems, Max Planck Society;
Dept. Metastable and Low-Dimensional Materials, Max Planck Institute for Intelligent Systems, Max Planck Society;
Stuttgart Center for Electron Microscopy, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Citation

Zhong, Z., Katsaros, G., Stoffel, M., Costantini, G., Kern, K., Schmidt, O. G., et al. (2005). Periodic pillar structures by Si etching of multilayer GeSi/Si islands. Applied Physics Letters, 87(26): 263102.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0010-48A6-D

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