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Antireflective subwavelength structures on microlens arrays—comparison of various manufacturing techniques

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Pacholski,  Claudia
Dept. New Materials and Biosystems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Morhard,  Christoph
Dept. New Materials and Biosystems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Spatz,  Joachim P.
Dept. New Materials and Biosystems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Citation

Pacholski, C., Morhard, C., Spatz, J. P., Lehr, D., Schulze, M., Kley, E.-B., et al. (2012). Antireflective subwavelength structures on microlens arrays—comparison of various manufacturing techniques. Applied Optics, 51(1), 8-14. doi:10.1364/AO.51.000008.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0010-4AFE-C
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