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Influence of nonstationary atomic mixing on depth resolution in sputter depth profiling

MPS-Authors
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Wang,  J. Y.
Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Hofmann,  S.
Emeriti and Others, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Wang, J. Y., Liu, Y., Hofmann, S., & Kovac, J. (2012). Influence of nonstationary atomic mixing on depth resolution in sputter depth profiling. 5, 569-572. doi:10.1002/sia.3855.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0010-4E4F-9
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