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Tailoring the stress-depth profile in thin films; the case of γ’-Fe4N1-x

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Wohlschlögel,  M.
Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Welzel,  U.
Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Mittemeijer,  E. J.
Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society;
Universität Stuttgart, Institut für Materialwissenschaft;

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Wohlschlögel, M., Welzel, U., & Mittemeijer, E. J. (2011). Tailoring the stress-depth profile in thin films; the case of γ’-Fe4N1-x. Thin Solid Films, 520, 287-293. doi:10.1016/j.tsf.2011.07.070.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0010-4EAE-2
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