Reichl, Udo Other publications of the MPI staff, Max Planck Institute for Dynamics of Complex Technical Systems, Max Planck Society;
Prescesky, S., Parameswaran, M., Rawicz, A., Turner, R. F. B., & Reichl, U. (1992). Silicon micromachining technology for sub-nanogram discrete mass resonant biosensors. Canadian Journal of Physics, 70(10-11), 1178-1183.