A portable quartz micro balance for physical vapor deposition techniques

Stuckenholz, Stefanie; Büchner, Christin; Thielsch, Gero; Heyde, Markus; Freund, Hans-Joachim

doi:10.1063/1.4819030

アイテム詳細

登録内容を編集ファイル形式で保存

一時保存へ追加

タグ情報を表示リリース履歴を表示詳細要約

公開

学術論文

A portable quartz micro balance for physical vapor deposition techniques

MPS-Authors

/persons/resource/persons32663

Stuckenholz, Stefanie
Chemical Physics, Fritz Haber Institute, Max Planck Society;

/persons/resource/persons21408

Büchner, Christin
Chemical Physics, Fritz Haber Institute, Max Planck Society;

/persons/resource/persons22172

Thielsch, Gero
Chemical Physics, Fritz Haber Institute, Max Planck Society;

/persons/resource/persons21628

Heyde, Markus
Chemical Physics, Fritz Haber Institute, Max Planck Society;

/persons/resource/persons21524

Freund, Hans-Joachim
Chemical Physics, Fritz Haber Institute, Max Planck Society;

External Resource

There are no locators available

Fulltext (restricted access)

There are currently no full texts shared for your IP range.

フルテキスト (公開)

1.4819030.pdf
(出版社版), 674KB

付随資料 (公開)

There is no public supplementary material available

引用

Stuckenholz, S., Büchner, C., Thielsch, G., Heyde, M., & Freund, H.-J. (2013). A portable quartz micro balance for physical vapor deposition techniques. Review of Scientific Instruments, 84(8):. doi:10.1063/1.4819030.

引用: https://hdl.handle.net/11858/00-001M-0000-0014-594D-7

要旨

A portable quartz crystal micro balance for physical vapor deposition techniques is presented. The device is used for the calibration of evaporators employed in the preparation of thin film systems that are studied in surface science. The design is based upon a portable sample setup, highly versatile and customizable. It can be transported within an ultrahigh vacuum system, stored in a sample garage and be used in front of different evaporators. Details of the setup are described. Finally, the performance of the device is demonstrated and compared to scanning tunneling microscopy measurements.