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Enabling technologies for system-level simulation of MEMS

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Feng,  Lihong
Computational Methods in Systems and Control Theory, Max Planck Institute for Dynamics of Complex Technical Systems, Max Planck Society;

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Bechtold, T., Schrag, G., & Feng, L. (2013). Enabling technologies for system-level simulation of MEMS. In Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) (pp. 1-6).


Cite as: http://hdl.handle.net/11858/00-001M-0000-0014-724D-A
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