Burg, T. P. Research Group of Biological Micro- and Nanotechnology, MPI for biophysical chemistry, Max Planck Society;
http://www.google.de/url?sa=t&rct=j&q=&esrc=s&source=web&cd=2&ved=0CEAQFjAB&url=http%3A%2F%2Fwww.cdpcenter.org%2Ffiles%2Fpubs%2Fburg_06_vacuumpackaged.pdf&ei=Fld6Up7UCsbAtAbc6IGoCw&usg=AFQjCNF9rQDdz8ARlsWde7wUYK2EzuCTgA&bvm=bv.55980276,d.Yms&cad=rja (Publisher version)
Burg, T. P., Mirza, A. R., Milovic, N., Tsau, C. H., Popescu, G. A., Foster, J. S., et al. (2006). Vacuum-packaged suspended microchannel resonant mass sensor for biomolecular detection. Journal of Microelectromechanical Systems, 16(6), 1466-1476. doi:10.1109/JMEMS.2006.883568.