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Abstract

We present a resonant mass sensor for specific biomolecular detection in a subnanoliter fluid volume. The sensing principle is based on measuring shifts in resonance frequency of a suspended microfluidic channel upon accumulation of molecules on the inside walls of the device. Confining the fluid to the inside of a hollow cantilever enables direct integration with conventional microfluidic systems, significantly increases sensitivity by eliminating high damping and viscous drag, and allows the resonator to be actuated by electrostatic forces. Fluid density measurements reveal a mass resolution of 10−17 g/μm2 in a 4 mHz–4 Hz bandwidth. To demonstrate biomolecular detection, we present real-time measurements of the specific binding between avidin and biotinylated bovine serum albumin. Based on these measurements, we expect that changes in surface mass loading on the order of 10−19 g/μm2 can be detected in an optimized system.