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Titania-assisted electron-beam and synchrotron lithography

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Skorb,  E. V.
Grenzflächen, Max Planck Institute of Colloids and Interfaces, Max Planck Society;

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Skorb, E. V., Grützmacher, D., Dais, C., Guzenko, V. A., Sokolov, V. G., Gaevskaya, T. V., et al. (2010). Titania-assisted electron-beam and synchrotron lithography. Nanotechnology, 21(31): 315301.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0015-4AE8-D
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