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Effective Young's Modulus Measurement of Thin Film Using Micromechanical Cantilever Sensors

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Förch,  Renate
Dept. Landfester: Physical Chemistry of Polymers, MPI for Polymer Research, Max Planck Society;

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Berger,  Rüdiger
Dept. Butt: Physics at Interfaces, MPI for Polymer Research, Max Planck Society;

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Citation

Itakura, A. N., Toda, M., Miyake, K., Förch, R., & Berger, R. (2013). Effective Young's Modulus Measurement of Thin Film Using Micromechanical Cantilever Sensors. Japanese Journal of Applied Physics, 52(11): UNSP 110111. doi:10.7567/JJAP.52.110111.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0018-4AE5-3
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