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Ion Sputter Rates and Yields for Iron-, Chromium- and Aluminium Oxide Layers

MPS-Authors
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Viefhaus,  Helmut
Physical Chemistry, Max-Planck-Institut für Eisenforschung GmbH, Max Planck Society;

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Hennesen,  Klaus
Physical Chemistry, Max-Planck-Institut für Eisenforschung GmbH, Max Planck Society;

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Lucas,  Manfred
Physical Chemistry, Max-Planck-Institut für Eisenforschung GmbH, Max Planck Society;

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Müller-Lorenz,  Else Marie
Physical Chemistry, Max-Planck-Institut für Eisenforschung GmbH, Max Planck Society;

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Grabke,  Hans-Jürgen
Physical Chemistry, Max-Planck-Institut für Eisenforschung GmbH, Max Planck Society;

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Viefhaus, H., Hennesen, K., Lucas, M., Müller-Lorenz, E. M., & Grabke, H.-J. (1994). Ion Sputter Rates and Yields for Iron-, Chromium- and Aluminium Oxide Layers. Surface and Interface Analysis, 21(9), 665-672. doi:10.1002/sia.740210911.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0019-744E-3
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