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Hillock Formation and Thermal Stresses in Thin Au Films on Si Substrates

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Sauter,  Linda Xenia
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Nucci,  Julie
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Arzt,  Eduard
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Citation

Sauter, L. X., Balk, T. J., Dehm, G., Nucci, J., & Arzt, E. (2005). Hillock Formation and Thermal Stresses in Thin Au Films on Si Substrates. Materials Research Society Symposium Proceedings, 875: O5.2, pp. 177-182.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0024-474B-9
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