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Passivation Effects in Copper Thin Films

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Wiederhirn,  Guillaume
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Nucci,  Julie A.
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Richter,  Gunther
Former Dept. Microstructure Interfaces, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Arzt,  Eduard
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Citation

Wiederhirn, G., Balk, T. J., Dehm, G., Nucci, J. A., Richter, G., & Arzt, E. (2006). Passivation Effects in Copper Thin Films. AIP Conference Proceedings, 817, 185-191.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0024-51AE-B
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