Recent advances in use of atomic layer deposition and focused ion beams for 
fabrication of Fresnel zone plates for hard x-rays

Keskinbora, K.; Robisch, A.-L.; Mayer, M.; Grévent, C.; Szeghalmi, A. V.; Knez, M.; Weigand, M.; Snigireva, I.; Snigirev, A.; Salditt, T.; Schütz, G.

doi:10.1117/12.2027251

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Recent advances in use of atomic layer deposition and focused ion beams for fabrication of Fresnel zone plates for hard x-rays

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Keskinbora, K.
Dept. Modern Magnetic Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Mayer, M.
Dept. Modern Magnetic Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Grévent, C.
Dept. Modern Magnetic Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Weigand, M.
Dept. Modern Magnetic Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Schütz, G.
Dept. Modern Magnetic Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Keskinbora, K., Robisch, A.-L., Mayer, M., Grévent, C., Szeghalmi, A. V., Knez, M., et al. (2013). Recent advances in use of atomic layer deposition and focused ion beams for fabrication of Fresnel zone plates for hard x-rays. Proceedings of SPIE (The International Society for Optical Engineering), 8851: 885119. doi:10.1117/12.2027251.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0019-B97D-9

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