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Online tuning of impedance matching circuit for long pulse inductively coupled plasma source operation – An alternate approach

MPS-Authors
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Kraus,  W.
ITER Technology & Diagnostics (ITED), Max Planck Institute for Plasma Physics, Max Planck Society;

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Sudhir_Online.pdf
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Citation

Sudhir, D., Bandyopadhyay, M., Kraus, W., Gahlaut, A., Bansal, G., & Chakraborty, A. (2014). Online tuning of impedance matching circuit for long pulse inductively coupled plasma source operation – An alternate approach. Review of Scientific Instruments, 85: 013510. doi:10.1063/1.4863098.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0019-C113-1
Abstract
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