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Journal Article

Multilayer Fresnel zone plates for high energy radiation resolve 21 nm features at 1.2 keV

MPS-Authors
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Keskinbora,  K.
Dept. Modern Magnetic Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Mayer,  M.
Dept. Modern Magnetic Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Sanli,  U.
Dept. Modern Magnetic Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Grévent,  C.
Dept. Modern Magnetic Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

Wolter,  C.
Dept. Modern Magnetic Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Weigand,  M.
Dept. Modern Magnetic Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Schütz,  G.
Dept. Modern Magnetic Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Citation

Keskinbora, K., Robisch, A.-L., Mayer, M., Sanli, U., Grévent, C., Wolter, C., et al. (2014). Multilayer Fresnel zone plates for high energy radiation resolve 21 nm features at 1.2 keV. Optics Express, 22(15), 18440-18453. doi:10.1364/OE.22.018440.


Cite as: https://hdl.handle.net/11858/00-001M-0000-001A-0712-4
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