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Conference Paper

Simulation of ion beam sputtering with SDTrimSP, TRIDYN and SRIM

MPS-Authors
/persons/resource/persons110024

Mutzke,  A.
Stellarator Theory (ST), Max Planck Institute for Plasma Physics, Max Planck Society;

Fulltext (public)

Hofsaess_Simulation.pdf
(Any fulltext), 628KB

Supplementary Material (public)
There is no public supplementary material available
Citation

Hofsäss, H., Zhang, K., & Mutzke, A. (2014). Simulation of ion beam sputtering with SDTrimSP, TRIDYN and SRIM. Applied Surface Science, 310, 134-141.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0023-C776-9
Abstract
There is no abstract available