Simulation of ion beam sputtering with SDTrimSP, TRIDYN and SRIM

Hofsäss, H.; Zhang, K.; Mutzke, A.

doi:10.1016/j.apsusc.2014.03.152

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Conference Paper

Simulation of ion beam sputtering with SDTrimSP, TRIDYN and SRIM

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Mutzke, A.
Stellarator Theory (ST), Max Planck Institute for Plasma Physics, Max Planck Society;

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http://dx.doi.org/10.1016/j.apsusc.2014.03.152
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Hofsaess_Simulation.pdf
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Citation

Hofsäss, H., Zhang, K., & Mutzke, A. (2014). Simulation of ion beam sputtering with SDTrimSP, TRIDYN and SRIM. Applied Surface Science, 310, 134-141.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0023-C776-9

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