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Shape control in wafer-based aperiodic 3D nanostructures

MPS-Authors
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Jeong,  Hyeon-Ho
Max Planck Research Group Micro, Nano, and Molecular Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Mark,  Andrew G.
Max Planck Research Group Micro, Nano, and Molecular Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Gibbs,  John G.
Max Planck Research Group Micro, Nano, and Molecular Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Fischer,  Peer
Max Planck Research Group Micro, Nano, and Molecular Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;
Institute for Physical Chemistry, University of Stuttgart, Stuttgart, Germany ;

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Citation

Jeong, H.-H., Mark, A. G., Gibbs, J. G., Reindl, T., Waizmann, U., Weis, J., et al. (2014). Shape control in wafer-based aperiodic 3D nanostructures. Nanotechnology, 25(23): 235302. doi:10.1088/0957-4484/25/23/235302.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0024-BA23-1
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