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Interaction of Deuterium Plasma with Sputter-deposited Tungsten Nitride Films

MPS-Authors
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Gao,  L.
Plasma Edge and Wall (E2M), Max Planck Institute for Plasma Physics, Max Planck Society;

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Jacob,  W.
Plasma Edge and Wall (E2M), Max Planck Institute for Plasma Physics, Max Planck Society;

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Schwarz-Selinger,  T.
Plasma Edge and Wall (E2M), Max Planck Institute for Plasma Physics, Max Planck Society;

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Manhard,  A.
Plasma Edge and Wall (E2M), Max Planck Institute for Plasma Physics, Max Planck Society;

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Meisl,  G.
Plasma Edge and Wall (E2M), Max Planck Institute for Plasma Physics, Max Planck Society;

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Gao, L., Jacob, W., Schwarz-Selinger, T., Manhard, A., & Meisl, G. (2015). Interaction of Deuterium Plasma with Sputter-deposited Tungsten Nitride Films. Talk presented at DPG-Frühjahrstagung 2015 der Fachverbände Kurzzeitphysik und Plasmaphysik. Bochum. 2015-03-02 - 2015-03-05.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0027-ACF6-6
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