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Photochemie von Disilan auf Silizium unter besonderer Berücksichtigung wachstumsrelevanter Prozesse

MPS-Authors

Dippel,  Olaf
Physical Chemistry, Fritz Haber Institute, Max Planck Society;

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Citation

Dippel, O. (1997). Photochemie von Disilan auf Silizium unter besonderer Berücksichtigung wachstumsrelevanter Prozesse. PhD Thesis, Freie Universität, Berlin.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0024-CEE8-2
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