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Single-step 3D nanofabrication of kinoform optics via gray-scale focused ion beam lithography for efficient X-ray focusing

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Keskinbora,  K.
Dept. Modern Magnetic Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Grévent,  C.
Dept. Modern Magnetic Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Hirscher,  M.
Dept. Modern Magnetic Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Weigand,  M.
Dept. Modern Magnetic Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Schütz,  G.
Dept. Modern Magnetic Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Keskinbora, K., Grévent, C., Hirscher, M., Weigand, M., & Schütz, G. (2015). Single-step 3D nanofabrication of kinoform optics via gray-scale focused ion beam lithography for efficient X-ray focusing. Advanced Optical Materials, 3, 792-800. doi:10.1002/adom.201400411.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0027-AB3F-C
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