Field emission beam characteristics of single metal nanotip cathodes with 
on-chip collimation gate electrode

Lee, Chiwon; Das Kanungo, Pratyush; Guzenko, Vitaliy; Hefenstein, Patrick; Miller, R. J. Dwayne; Tsujino, Soichiro

doi:10.1116/1.4913397

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Field emission beam characteristics of single metal nanotip cathodes with on-chip collimation gate electrode

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Lee, Chiwon
Miller Group, Atomically Resolved Dynamics Department, Max Planck Institute for the Structure and Dynamics of Matter, Max Planck Society;
Laboratory for Micro and Nanotechnology, Paul Scherrer Institute, Villigen 5232, Switzerland;
CFEL, Luruper Chaussee 149, 22761 Hamburg, Germany;

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Miller, R. J. Dwayne
Miller Group, Atomically Resolved Dynamics Department, Max Planck Institute for the Structure and Dynamics of Matter, Max Planck Society;
Departments of Chemistry and Physics, University of Toronto, 80 St. George Street Toronto, Ontario M5S 3H6, Canada;
CFEL, Luruper Chaussee 149, 22761 Hamburg, Germany;

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Citation

Lee, C., Das Kanungo, P., Guzenko, V., Hefenstein, P., Miller, R. J. D., & Tsujino, S. (2015). Field emission beam characteristics of single metal nanotip cathodes with on-chip collimation gate electrode. Journal of Vacuum Science and Technology B, 33(3): 03C111. doi:10.1116/1.4913397.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0026-A126-3

Abstract

Field-emission and beam collimation characteristics of single metal nanotip devices with double-gate electrodes are studied. Applying a previously developed method to fabricate all-metal double-gate nanotip arrays with a stacked on-chip extraction G_ext and collimation G_col gate electrodes with the large G_col apertures, the authors produced single double-gate nanotip devices and measured their beam characteristics. Excellent beam collimation capability with minimal reduction of the emission current and the enhancements of the current density up to a factor of ∼7 was observed. The results indicate that these single nanotip devices are highly promising for electron beam applications that require extremely high brilliance and coherence.