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Untersuchung der Erosion von Kohlenwasserstoffschichten in Sauerstoff-Gasentladungen. - Erosion of Hydrogenated Carbon Films in Oxygen Glow Discharges

MPS-Authors
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Landkammer,  B.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Fulltext (public)

IPP_9_122.pdf
(Any fulltext), 158MB

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Citation

Landkammer, B.(1999). Untersuchung der Erosion von Kohlenwasserstoffschichten in Sauerstoff-Gasentladungen. - Erosion of Hydrogenated Carbon Films in Oxygen Glow Discharges (IPP 9/122). Garching(DE): Max-Planck-Institut für Plasmaphysik.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0027-6029-1
Abstract
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