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Quantitative Bestimmung der Teilchenflüsse aus Methan-ECR-Plasmen = Quantitative Determination of the Particle Fluxes Emanating from Methane ECR Plasmas

MPS-Authors
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Pecher,  P.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Fulltext (public)

IPP-9-118.pdf
(Any fulltext), 2MB

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Citation

Pecher, P.(1998). Quantitative Bestimmung der Teilchenflüsse aus Methan-ECR-Plasmen = Quantitative Determination of the Particle Fluxes Emanating from Methane ECR Plasmas (IPP 9/118). Garching: Max-Planck-Institut für Plasmaphysik.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0027-607C-5
Abstract
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