Quantitative Bestimmung der Teilchenflüsse aus Methan-ECR-Plasmen = 
Quantitative Determination of the Particle Fluxes Emanating from Methane ECR 
Plasmas

Pecher, P.

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Quantitative Bestimmung der Teilchenflüsse aus Methan-ECR-Plasmen = Quantitative Determination of the Particle Fluxes Emanating from Methane ECR Plasmas

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Pecher, P.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Pecher, P.(1998). Quantitative Bestimmung der Teilchenflüsse aus Methan-ECR-Plasmen = Quantitative Determination of the Particle Fluxes Emanating from Methane ECR Plasmas (IPP 9/118). Garching: Max-Planck-Institut für Plasmaphysik.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0027-607C-5

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