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Amorphe hydrogenisierte Bor-Kohlenstoff-Filme: Herstellung, Charakterisierung und Untersuchung des Erosionsverhaltens

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Annen,  A.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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IPP-9-114.pdf
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Citation

Annen, A.(1997). Amorphe hydrogenisierte Bor-Kohlenstoff-Filme: Herstellung, Charakterisierung und Untersuchung des Erosionsverhaltens (IPP 9/114). Garching: Max-Planck-Institut für Plasmaphysik.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0027-60FE-3
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