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Sputtering Data

MPS-Authors
/persons/resource/persons109001

Eckstein,  W.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

/persons/resource/persons109140

Garcia-Rosales,  C.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

/persons/resource/persons110287

Roth,  J.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Fulltext (public)

IPP_9_82.pdf
(Any fulltext), 7MB

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Citation

Eckstein, W., Garcia-Rosales, C., Roth, J., & Ottenberger, W.(1993). Sputtering Data (IPP 9/82). Garching: Max-Planck-Institut für Plasmaphysik.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0027-6324-6
Abstract
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