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Messung und Modellierung absoluter Radikaldichten in einem ECR-Methanplasma.

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IPP_4_262.1.pdf
(Any fulltext), 158MB

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Citation

Engelhard, M.(1993). Messung und Modellierung absoluter Radikaldichten in einem ECR-Methanplasma. (IPP 4/262). Garching (DE): Max-Planck-Institut für Plasmaphysik.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0027-636C-8
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