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Control of the plasma chemistry of a pulsed inductively coupled methane plasma

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Bauer,  M.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Schwarz-Selinger,  T.
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

/persons/resource/persons109560

Kang,  H.
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Bauer, M., Schwarz-Selinger, T., Kang, H., & von Keudell, A. (2005). Control of the plasma chemistry of a pulsed inductively coupled methane plasma. Plasma Sources Science and Technology, 14, 543-548. doi:10.1088/0963-0252/14/3/017.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0027-1801-1
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