Bestimmung der Wachstumsprecursoren für amorphe Kohlenwasserstoffschichten in 
gepulsten Methanplasmen

Bauer, M.

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Bestimmung der Wachstumsprecursoren für amorphe Kohlenwasserstoffschichten in gepulsten Methanplasmen

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Bauer, M.
Centre for Interdisciplinary Plasma Science (CIPS), Max Planck Institute for Plasma Physics, Max Planck Society;
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Bauer, M. (2004). Bestimmung der Wachstumsprecursoren für amorphe Kohlenwasserstoffschichten in gepulsten Methanplasmen. PhD Thesis, Universität Bayreuth, Bayreuth.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0027-1AF7-9

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