Bestimmung der Wachstumsprecursoren für amorphe Kohlenwasserstoffschichten in 
gepulsten Methanplasmen

Bauer, M.

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Bestimmung der Wachstumsprecursoren für amorphe Kohlenwasserstoffschichten in gepulsten Methanplasmen

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Bauer, M.
Centre for Interdisciplinary Plasma Science (CIPS), Max Planck Institute for Plasma Physics, Max Planck Society;
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Bauer, M.(2004). Bestimmung der Wachstumsprecursoren für amorphe Kohlenwasserstoffschichten in gepulsten Methanplasmen (IPP 9/135). Garching bei München: Max-Planck-Institut für Plasmaphysik.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0027-1CB8-B

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