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PIC-MCC modeling of a Capacitive RF discharge

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Matyash,  K.
Stellarator Theory (ST), Max Planck Institute for Plasma Physics, Max Planck Society;

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Schneider,  R.
Stellarator Theory (ST), Max Planck Institute for Plasma Physics, Max Planck Society;

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Matyash, K., & Schneider, R. (2004). PIC-MCC modeling of a Capacitive RF discharge. Contributions to Plasma Physics, 44, 589-593. Retrieved from http://dx.doi.org/10.1002/ctpp.200410086.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0027-1F17-E
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