English
 
Help Privacy Policy Disclaimer
  Advanced SearchBrowse
  1. View item / 
  2. Item Summary

Item

ITEM ACTIONSEXPORT
Add to Basket
  Local TagsRelease HistoryDetailsSummary

Released
Journal Article

Modeling of hydrocarbon species in ECR methane plasmas

MPS-Authors
/persons/resource/persons109904

Matyash,  K.
Stellarator Theory (ST), Max Planck Institute for Plasma Physics, Max Planck Society;

/persons/resource/persons110407

Schneider,  R.
Stellarator Theory (ST), Max Planck Institute for Plasma Physics, Max Planck Society;

/persons/resource/persons108681

Bergmann,  A.
Tokamak Theory (TOK), Max Planck Institute for Plasma Physics, Max Planck Society;

/persons/resource/persons109489

Jacob,  W.
Centre for Interdisciplinary Plasma Science (CIPS), Max Planck Institute for Plasma Physics, Max Planck Society;
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

/persons/resource/persons109061

Fantz,  U.
Experimental Plasma Physics 4 (E4), Max Planck Institute for Plasma Physics, Max Planck Society;

External Resource
No external resources are shared
Fulltext (restricted access)
There are currently no full texts shared for your IP range.
Fulltext (public)
There are no public fulltexts stored in PuRe
Supplementary Material (public)
There is no public supplementary material available
Citation

Matyash, K., Schneider, R., Bergmann, A., Jacob, W., Fantz, U., & Percher, P. (2003). Modeling of hydrocarbon species in ECR methane plasmas. Journal of Nuclear Materials, 313-316, 434-438. doi:10.1016/S0022-3115(02)01410-1.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0027-30DC-0
Abstract
ECR methane laboratory plasmas are modeled using both a simple zero-dimensional particle balance model and a fully kinetic model. The kinetic model consists of a two-dimensional in space, three-dimensional in velocity space particle-in-cell model with Monte-Carlo collisions in which electrons, ions and neutrals are treated as particles, moving in self-consistent electric and external magnetic fields. The model results are discussed and compared with experimental data.