Modeling of hydrocarbon species in ECR methane plasmas

Matyash, K.; Schneider, R.; Bergmann, A.; Jacob, W.; Fantz, U.; Percher, P.

doi:10.1016/S0022-3115(02)01410-1

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Modeling of hydrocarbon species in ECR methane plasmas

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Matyash, K.
Stellarator Theory (ST), Max Planck Institute for Plasma Physics, Max Planck Society;

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Schneider, R.
Stellarator Theory (ST), Max Planck Institute for Plasma Physics, Max Planck Society;

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Bergmann, A.
Tokamak Theory (TOK), Max Planck Institute for Plasma Physics, Max Planck Society;

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Jacob, W.
Centre for Interdisciplinary Plasma Science (CIPS), Max Planck Institute for Plasma Physics, Max Planck Society;
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Fantz, U.
Experimental Plasma Physics 4 (E4), Max Planck Institute for Plasma Physics, Max Planck Society;

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Citation

Matyash, K., Schneider, R., Bergmann, A., Jacob, W., Fantz, U., & Percher, P. (2003). Modeling of hydrocarbon species in ECR methane plasmas. Journal of Nuclear Materials, 313-316, 434-438. doi:10.1016/S0022-3115(02)01410-1.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0027-30DC-0

Abstract

ECR methane laboratory plasmas are modeled using both a simple zero-dimensional particle balance model and a fully kinetic model. The kinetic model consists of a two-dimensional in space, three-dimensional in velocity space particle-in-cell model with Monte-Carlo collisions in which electrons, ions and neutrals are treated as particles, moving in self-consistent electric and external magnetic fields. The model results are discussed and compared with experimental data.