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Interaction of CH3 and H with amorphous hydrocarbon surfaces: estimation of reaction cross sections using Bayesian probability theory

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Meier,  M.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;
Centre for Interdisciplinary Plasma Science (CIPS), Max Planck Institute for Plasma Physics, Max Planck Society;

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Preuss,  R.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;
Centre for Interdisciplinary Plasma Science (CIPS), Max Planck Institute for Plasma Physics, Max Planck Society;

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Citation

Meier, M., Preuss, R., & Dose, V. (2003). Interaction of CH3 and H with amorphous hydrocarbon surfaces: estimation of reaction cross sections using Bayesian probability theory. New Journal of Physics, 5: 133. Retrieved from http://www.iop.org/EJ/article/1367-2630/5/1/133/njp3_1_133.pdf.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0027-3B8E-C
Abstract
The interaction of CH3 and H with amorphous hydrocarbon surfaces plays a central role during plasma deposition of such films. Recently, this interaction has been explored in particle beam experiments. A rate equation model has been proposed which explains the experimental observations on the basis of elementary surface reactions. This model includes several parameters which have the meaning of either a reaction cross section or a rate constant. The predictive power of the model and its applicability to more complex hydrocarbon deposition processes hinges on a reliable determination of the model parameters. In this paper, we develop a Bayesian analysis of the data. The result of this analysis are estimation distributions for each parameter rather than single numbers. We use this in-depth information to draw valuable conclusions about the ability of the model to describe the surface reactions. We find strong indications for a dependence of the reaction cross sections on the particles’ angle of incidence.