English
 
User Manual Privacy Policy Disclaimer Contact us
  Advanced SearchBrowse

Item

ITEM ACTIONSEXPORT

Released

Journal Article

Growth of metal newborn formations on cathode surface under influence of plasma flow

MPS-Authors
/persons/resource/persons108730

Bobkov,  V. V.
Technology (TE), Max Planck Institute for Plasma Physics, Max Planck Society;

/persons/resource/persons108730

Bobkov,  Vl. V.
Technology (TE), Max Planck Institute for Plasma Physics, Max Planck Society;

Locator
There are no locators available
Fulltext (public)
There are no public fulltexts available
Supplementary Material (public)
There is no public supplementary material available
Citation

Bobkov, V. V., Alimov, S. S., Bobkov, V. V., Slyusarenko, Y. V., & Starovoitov, R. I. (2003). Growth of metal newborn formations on cathode surface under influence of plasma flow. Surface and Coatings Technology, 174-175, 1271-1275. Retrieved from http://www.sciencedirect.com/science?_ob=MImg&_imagekey=B6TVV-490H26K-1-G&_cdi=5544&_orig=browse&_coverDate=10%2F31%2F2003&_sk=998259999&view=c&wchp=dGLbVzz-zSkzV&_acct=C000007558&_version=1&_userid=100196&md5=2f92687854ff859215834663834e0f4c&ie=f.pdf.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0027-3D20-0
Abstract
The article presents results of the experimental studies and theoretical description of processes that occur during modification of a Cu cathode surface in the magnetron discharge in Ar. The experimentally observed cone-like microprotrusions are classified and possible mechanisms responsible for the growth of such formations with dimensions in the range 1–100 m are discussed. An analytical model is proposed for the experimentally observed phenomena of growth of the cone-like microprotrusions. We consider the case when a strong electric field in the cathode sheath of the discharge is taken into consideration during sputtering.