Direct verification of the ion-neutral synergism during hydrocarbon film growth

Hopf, C.; von Keudell, A.; Jacob, W.

doi:10.1063/1.1543247

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Direct verification of the ion-neutral synergism during hydrocarbon film growth

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Hopf, C.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;
Centre for Interdisciplinary Plasma Science (CIPS), Max Planck Institute for Plasma Physics, Max Planck Society;

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von Keudell, A.
Centre for Interdisciplinary Plasma Science (CIPS), Max Planck Institute for Plasma Physics, Max Planck Society;
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Jacob, W.
Centre for Interdisciplinary Plasma Science (CIPS), Max Planck Institute for Plasma Physics, Max Planck Society;
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Hopf, C., von Keudell, A., & Jacob, W. (2003). Direct verification of the ion-neutral synergism during hydrocarbon film growth. Journal of Applied Physics, 93(6), 3352-3358. doi:10.1063/1.1543247.

引用: https://hdl.handle.net/11858/00-001M-0000-0027-3DBC-1

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