Radical detection in a methane plasma

Kang, H. D.; Dose, V.

doi:10.1116/1.1621405

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Radical detection in a methane plasma

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Kang, H. D.
Centre for Interdisciplinary Plasma Science (CIPS), Max Planck Institute for Plasma Physics, Max Planck Society;
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Kang, H. D., & Dose, V. (2003). Radical detection in a methane plasma. Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films, 21, 1978-1980. doi:10.1116/1.1621405.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0027-3DD4-9

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