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Solid Ion Source Based on Hollow-Cylindrical Magnetron Sputtering Discharges

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Bizyukov,  I. A.
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Bobkov,  V. V.
Technology (TE), Max Planck Institute for Plasma Physics, Max Planck Society;

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Krieger,  K.
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Citation

Azarenkov, N. A., Bizyukov, A. A., Bizyukov, I. A., Bobkov, V. V., Kashaba, A. Y., Krieger, K., et al. (2003). Solid Ion Source Based on Hollow-Cylindrical Magnetron Sputtering Discharges. Voprosy Atomnoj Nauki i Techniki, Serijya Fizika Plazmy, 9, 125-127.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0027-3DF6-0
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