Surface Wave Ion Source for Producing Lange Area Coatings (Report)

Azarenkov, N. A.; Bizyukov, I. A.; Kashaba, A. Y.; Sereda, K. N.; Tarasov, I. K.; Romashenko, E. V.

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Surface Wave Ion Source for Producing Lange Area Coatings (Report)

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Bizyukov, I. A.
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Azarenkov, N. A., Bizyukov, I. A., Kashaba, A. Y., Sereda, K. N., Tarasov, I. K., & Romashenko, E. V. (2003). Surface Wave Ion Source for Producing Lange Area Coatings (Report). In 10th Anniversary Scientifical Technical Conference on Vacuum Science and Technology (pp. 362-366). Moscow: Moscow National Institute of Electronics and Mathematics.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0027-3DFA-8

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