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Chemische Zerstäubung und ioneneunterstütztes Wachstum amorpher Kohlenwasserstoffschichten . Experimente mit Teilchenstrahlen. Chemical Sputtering and Ion-enhanced Growth of Amorphous Hydrocarbon Films - a Particle-beam Experiment

MPS-Authors
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Hopf,  C.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;
Centre for Interdisciplinary Plasma Science (CIPS), Max Planck Institute for Plasma Physics, Max Planck Society;

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IPP_9_134.pdf
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Citation

Hopf, C.(2003). Chemische Zerstäubung und ioneneunterstütztes Wachstum amorpher Kohlenwasserstoffschichten. Experimente mit Teilchenstrahlen. Chemical Sputtering and Ion-enhanced Growth of Amorphous Hydrocarbon Films - a Particle-beam Experiment (IPP 9/134). Garching: Max-Planck-Institut für Plasmaphysik.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0027-4006-D
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