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Journal Article

Depth profiles and resolution limits in accelerator-based solid state analysis

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Fischer,  R.
Centre for Interdisciplinary Plasma Science (CIPS), Max Planck Institute for Plasma Physics, Max Planck Society;
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Citation

Fischer, R. (2002). Depth profiles and resolution limits in accelerator-based solid state analysis. Analytical and Bioanalytical Chemistry, 374(4), 619-625.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0027-41A9-8
Abstract
A ubiquitous problem in solid state analysis is the determination of the elemental composition of a sample as a function of the depth. The determination of the depth profiles from ion-beam experiments is an ill-posed inversion problem due to ion-beam and detector-induced energy spreads as well as energy-loss straggling and small-angle scattering effects. The inversion problem is solved in the framework of Bayesian probability theory, which provides a method for quantifying and combining uncertain data and uncertain additional information. By deconvolving the apparatus transfer function and modeling the scattering events in the sample we reconstructed depth profiles of C-13 in tetrahedral amorphous carbon (ta-C) and depth profiles in C-12/C-13 marker probes. An enhancement of the energy resolution by a factor of 6 was obtained.