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Investigation of the Influence of Substrate Temperature and Bias Voltage on the Crystal Structure of Vacuum Arc Deposited Al2O3 Coatings

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Beguiristain Repáraz,  I.
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Beguiristain Repáraz, I. (2001). Investigation of the Influence of Substrate Temperature and Bias Voltage on the Crystal Structure of Vacuum Arc Deposited Al2O3 Coatings. Diploma Thesis, Universidad de Navarra, San Sebastián.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0027-454D-7
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